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  • The aim of this paper to show the antibacterial effect of thin titanium oxides films with oriented growth made by Glancing Angle Deposition (GLAD). The films were deposited by DC unbalanced magnetron sputtering at low temperature. Those layers were diagnosed by AFM and SEM. Incline columns architecture of thin films with different amount of oxygen was examined from the point of view of antibacterial effect. Two different deposition methods - RGCF (Reactive Gas Constant Flow) and RGPP (Reactive Gas Pulsing Process) were used.
  • The aim of this paper to show the antibacterial effect of thin titanium oxides films with oriented growth made by Glancing Angle Deposition (GLAD). The films were deposited by DC unbalanced magnetron sputtering at low temperature. Those layers were diagnosed by AFM and SEM. Incline columns architecture of thin films with different amount of oxygen was examined from the point of view of antibacterial effect. Two different deposition methods - RGCF (Reactive Gas Constant Flow) and RGPP (Reactive Gas Pulsing Process) were used. (en)
Title
  • New TiOx films with oriented growth doped by nitrogen and their antibacterial effect
  • New TiOx films with oriented growth doped by nitrogen and their antibacterial effect (en)
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  • New TiOx films with oriented growth doped by nitrogen and their antibacterial effect
  • New TiOx films with oriented growth doped by nitrogen and their antibacterial effect (en)
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  • RIV/60076658:12410/11:43883190!RIV12-AV0-12410___
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  • glancing angle deposition, reactive gas pulsing process, physical vapour deposition, antibacterial effects (en)
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  • Kříž, Pavel
  • Bartoš, Petr
  • Špatenka, Petr
  • Michalčík, Zdeněk
  • Pekárek, Michal
  • Martin, Nicolas
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  • 12410
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