About: Spectroscopic monitoring of low pressure plasma deposition of Silane and Siloxane based thin films     Goto   Sponge   Distinct   Permalink

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  • The main part of this work is focused on the identification of the spectra measured during the plasma deposition using the vinyltriethoxysilane in a continual regime and also in a pulsed regime with the varied relative pulse duration and during deposition with an amount of oxygen added in various ratios. The next part is focused on spectroscopic observation during the plasma deposition using the hexamethyldisiloxane and gamma-metacryloxyprophyltrimethoxysilane.
  • The main part of this work is focused on the identification of the spectra measured during the plasma deposition using the vinyltriethoxysilane in a continual regime and also in a pulsed regime with the varied relative pulse duration and during deposition with an amount of oxygen added in various ratios. The next part is focused on spectroscopic observation during the plasma deposition using the hexamethyldisiloxane and gamma-metacryloxyprophyltrimethoxysilane. (en)
Title
  • Spectroscopic monitoring of low pressure plasma deposition of Silane and Siloxane based thin films
  • Spectroscopic monitoring of low pressure plasma deposition of Silane and Siloxane based thin films (en)
skos:prefLabel
  • Spectroscopic monitoring of low pressure plasma deposition of Silane and Siloxane based thin films
  • Spectroscopic monitoring of low pressure plasma deposition of Silane and Siloxane based thin films (en)
skos:notation
  • RIV/00216305:26310/03:PU38274!RIV/2004/MSM/263104/N
http://linked.open.../vavai/riv/strany
  • 441-445
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM 263100019)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
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  • 628162
http://linked.open...ai/riv/idVysledku
  • RIV/00216305:26310/03:PU38274
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Plasma deposition, optical emission spectroscopy, organosilicones (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [C57AE617F524]
http://linked.open...v/mistoKonaniAkce
  • Praha
http://linked.open...i/riv/mistoVydani
  • Praha
http://linked.open...i/riv/nazevZdroje
  • Proceedings of the 12th Annual Conference of Doctoral Students - WDS 2003
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
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http://linked.open...nichUcastnikuAkce
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http://linked.open...iv/tvurceVysledku
  • Krčma, František
  • Přikryl, Radek
  • Vaněk, Jan
  • Čech, Vladimír
  • Rašková, Zuzana
  • Šormová, Hana
  • Havelková, Iveta
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • MATFYZPRESS
https://schema.org/isbn
  • 80-86732-18-5
http://localhost/t...ganizacniJednotka
  • 26310
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