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  • The enormous power of today`s computers has enabled the TCAD (Technology CAD) to become a workhorse of microelectronics progress. The development of sophisticated and efficient one-, two- and three-dimensional semiconductor process and device software tools will provide the engineers significant leverage in conducting research into new areas of IC technologies. The contribution reviews process and device simulation tools in common use and deals with the required features of the new TCAD tools generaation.
  • The enormous power of today`s computers has enabled the TCAD (Technology CAD) to become a workhorse of microelectronics progress. The development of sophisticated and efficient one-, two- and three-dimensional semiconductor process and device software tools will provide the engineers significant leverage in conducting research into new areas of IC technologies. The contribution reviews process and device simulation tools in common use and deals with the required features of the new TCAD tools generaation. (en)
Title
  • TCAD tools in process and device simulation
  • TCAD tools in process and device simulation (en)
skos:prefLabel
  • TCAD tools in process and device simulation
  • TCAD tools in process and device simulation (en)
skos:notation
  • RIV/00216305:26220/02:PU30455!RIV/2003/MSM/262203/N
http://linked.open.../vavai/riv/strany
  • 187-192
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM 262200022)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
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  • 666384
http://linked.open...ai/riv/idVysledku
  • RIV/00216305:26220/02:PU30455
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • TCAD, process simulation, device simulation, (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [1B37FF8A1167]
http://linked.open...v/mistoKonaniAkce
  • Brno
http://linked.open...i/riv/mistoVydani
  • Brno
http://linked.open...i/riv/nazevZdroje
  • Electronics Devices and Systems EDS02. Proceedings.
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
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http://linked.open...nichUcastnikuAkce
http://linked.open...UplatneniVysledku
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  • Recman, Milan
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • Ing. Zdeněk Novotný CSc.
https://schema.org/isbn
  • 80-214-2180-0
http://localhost/t...ganizacniJednotka
  • 26220
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