Attributes | Values |
---|
rdf:type
| |
Description
| - The study of the influence of the annealing on the mechanical and optical properties of the plasma deposited DLC films is performed. The DLC films were prepared for different values of hydrogen content from the mixture of methan and hydrogen in PECVD reactor. The optical properties of aforementioned DLC films were studied ex-situ using variable angle spectroscopic ellipsometry and spectroscopic reflectometry applied within the near-UV, visible and near-IR regions. For optical constants determination our dispersion model based on parametrization of the densities of electronic states was used. The dependence of the hardness and elastic modulus on the hydrogen content in the deposition feed was determined using depth sensing indentation technique.The connection between the hardness and elastic modulus on the one hand and optical constants on the other hand was shown. The annealing of the DLC films strongly changed their mechanical, optical and electrical properties.
- The study of the influence of the annealing on the mechanical and optical properties of the plasma deposited DLC films is performed. The DLC films were prepared for different values of hydrogen content from the mixture of methan and hydrogen in PECVD reactor. The optical properties of aforementioned DLC films were studied ex-situ using variable angle spectroscopic ellipsometry and spectroscopic reflectometry applied within the near-UV, visible and near-IR regions. For optical constants determination our dispersion model based on parametrization of the densities of electronic states was used. The dependence of the hardness and elastic modulus on the hydrogen content in the deposition feed was determined using depth sensing indentation technique.The connection between the hardness and elastic modulus on the one hand and optical constants on the other hand was shown. The annealing of the DLC films strongly changed their mechanical, optical and electrical properties. (en)
|
Title
| - Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films
- Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films (en)
|
skos:prefLabel
| - Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films
- Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films (en)
|
skos:notation
| - RIV/00216305:26210/07:PU68172!RIV12-MSM-26210___
|
http://linked.open...avai/riv/aktivita
| |
http://linked.open...avai/riv/aktivity
| - P(GA106/05/0274), S, Z(MSM0021622411)
|
http://linked.open...iv/cisloPeriodika
| |
http://linked.open...vai/riv/dodaniDat
| |
http://linked.open...aciTvurceVysledku
| |
http://linked.open.../riv/druhVysledku
| |
http://linked.open...iv/duvernostUdaju
| |
http://linked.open...titaPredkladatele
| |
http://linked.open...dnocenehoVysledku
| |
http://linked.open...ai/riv/idVysledku
| - RIV/00216305:26210/07:PU68172
|
http://linked.open...riv/jazykVysledku
| |
http://linked.open.../riv/klicovaSlova
| - Thermal stability, Optical constants, Electronic structure, Free-carrier anisotropy (en)
|
http://linked.open.../riv/klicoveSlovo
| |
http://linked.open...odStatuVydavatele
| |
http://linked.open...ontrolniKodProRIV
| |
http://linked.open...i/riv/nazevZdroje
| - Diamond and Related Materials
|
http://linked.open...in/vavai/riv/obor
| |
http://linked.open...ichTvurcuVysledku
| |
http://linked.open...cetTvurcuVysledku
| |
http://linked.open...vavai/riv/projekt
| |
http://linked.open...UplatneniVysledku
| |
http://linked.open...v/svazekPeriodika
| |
http://linked.open...iv/tvurceVysledku
| - Buršíková, Vilma
- Franta, Daniel
- Nečas, David
- Ohlídal, Ivan
- Ohlídal, Miloslav
- Šťahel, Pavel
|
http://linked.open...n/vavai/riv/zamer
| |
issn
| |
number of pages
| |
http://localhost/t...ganizacniJednotka
| |
is http://linked.open...avai/riv/vysledek
of | |