About: Chalcogenide glass resists for lithography     Goto   Sponge   Distinct   Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

AttributesValues
rdf:type
Description
  • This chapter comprehensively reviews the possible structural and compositional changes of chalcogenide glasses induced by exposure with suitable radiation (VIS, UV, X-ray, e-beam, ions) which result in their highly selective wet or dry etching and make chalcogenide glasses superior resists for high resolution, gray scale lithography. Their photo- and e-beam resist applications are compared with those for widely used polymer resists.
  • This chapter comprehensively reviews the possible structural and compositional changes of chalcogenide glasses induced by exposure with suitable radiation (VIS, UV, X-ray, e-beam, ions) which result in their highly selective wet or dry etching and make chalcogenide glasses superior resists for high resolution, gray scale lithography. Their photo- and e-beam resist applications are compared with those for widely used polymer resists. (en)
Title
  • Chalcogenide glass resists for lithography
  • Chalcogenide glass resists for lithography (en)
skos:prefLabel
  • Chalcogenide glass resists for lithography
  • Chalcogenide glass resists for lithography (en)
skos:notation
  • RIV/00216275:25310/14:39897425!RIV15-MSM-25310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • I, P(GAP204/11/0832)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 6754
http://linked.open...ai/riv/idVysledku
  • RIV/00216275:25310/14:39897425
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • nano lithography; resists; chalcogenide glass (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [E2443880A632]
http://linked.open...i/riv/mistoVydani
  • Cambridge
http://linked.open...i/riv/nazevZdroje
  • Chalcogenide Glasses: Preparation, Properties and Applications
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...v/pocetStranKnihy
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Vlček, Miroslav
  • Jain, Himanshu
  • Kovalskiy, Andriy
number of pages
http://purl.org/ne...btex#hasPublisher
  • Woodhead Publishing
https://schema.org/isbn
  • 978-0-85709-345-5
http://localhost/t...ganizacniJednotka
  • 25310
Faceted Search & Find service v1.16.118 as of Jun 21 2024


Alternative Linked Data Documents: ODE     Content Formats:   [cxml] [csv]     RDF   [text] [turtle] [ld+json] [rdf+json] [rdf+xml]     ODATA   [atom+xml] [odata+json]     Microdata   [microdata+json] [html]    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 117 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software