About: Analysis of the Transport of Ionized Titanium Atoms in a Highly Ionized Sputter Deposition Process

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The paper study transport of ionized sputtered particles by means of time and space resolved optical absorption spectroscopy - we concluded that the transport is govern maainly by ambipolar difussion. The paper study transport of ionized sputtered particles by means of time and space resolved optical absorption spectroscopy - we concluded that the transport is govern maainly by ambipolar difussion. (en)
Title	Analysis of the Transport of Ionized Titanium Atoms in a Highly Ionized Sputter Deposition Process Analysis of the Transport of Ionized Titanium Atoms in a Highly Ionized Sputter Deposition Process (en)
skos:prefLabel	Analysis of the Transport of Ionized Titanium Atoms in a Highly Ionized Sputter Deposition Process Analysis of the Transport of Ionized Titanium Atoms in a Highly Ionized Sputter Deposition Process (en)
skos:notation	RIV/00216224:14310/07:00022169!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(MSM0021622411)
http://linked.open...iv/cisloPeriodika	S1
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Vašina, Petr
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	409572
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/07:00022169
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	ambipolar difussion; charged particle transport; high power pulsed; magnetron sputtering (en)
http://linked.open.../riv/klicoveSlovo	magnetron sputtering ambipolar difussion charged particle transport high power pulsed
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[3A26029403B6]
http://linked.open...i/riv/nazevZdroje	Plasma Processes and Polymers
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	8 (xsd:int)
http://linked.open...UplatneniVysledku	2007
http://linked.open...v/svazekPeriodika	4/2007
http://linked.open...iv/tvurceVysledku	Vašina, Petr Bretagne, Jean Touzeau, Michel de Poucques, Ludovic Imbert, Jean-Christophe Teulé-Gay, Lionel Ganciu, Mihai Boisse-Laporte, Carolline
http://linked.open...n/vavai/riv/zamer	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
issn	1612-8850
number of pages	5 (xsd:int)
http://localhost/t...ganizacniJednotka	14310
is http://linked.open...avai/riv/vysledek of	Analysis of the Transport of Ionized Titanium Atoms in a Highly Ionized Sputter Deposition Process Analysis of the Transport of Ionized Titanium Atoms in a Highly Ionized Sputter Deposition Process Analysis of the Transport of Ionized Titanium Atoms in a Highly Ionized Sputter Deposition Process

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