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  • Capacitively coupled RF discharge in neon (13.56 MHz) was studied by spatially resolved optical emission spectroscopy and collisional-radiative model. Two discharge regimes at different pressures (10 and 80 Pa) were investigated. The measured intensities of prominent neon spectral lines in conjunction with the model were used to determine the electron temperature.
  • Capacitively coupled RF discharge in neon (13.56 MHz) was studied by spatially resolved optical emission spectroscopy and collisional-radiative model. Two discharge regimes at different pressures (10 and 80 Pa) were investigated. The measured intensities of prominent neon spectral lines in conjunction with the model were used to determine the electron temperature. (en)
Title
  • Spatially resolved optical diagnostics of neon RF discharge
  • Spatially resolved optical diagnostics of neon RF discharge (en)
skos:prefLabel
  • Spatially resolved optical diagnostics of neon RF discharge
  • Spatially resolved optical diagnostics of neon RF discharge (en)
skos:notation
  • RIV/00216224:14310/07:00020161!RIV10-GA0-14310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA202/06/0776), P(GA202/06/1473)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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  • 451424
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/07:00020161
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  • neon RF discharge; optical emission spectroscopy; collisional-radiative model (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [D0290085E399]
http://linked.open...v/mistoKonaniAkce
  • Podbanské
http://linked.open...i/riv/mistoVydani
  • Bratislava
http://linked.open...i/riv/nazevZdroje
  • Book of Abstracts of 16th Symposium on Application of Plasma Processes
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http://linked.open...UplatneniVysledku
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  • Navrátil, Zdeněk
  • Šmíd, Radek
  • Trunec, David
  • Lazar, Lukáš
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http://linked.open.../riv/zahajeniAkce
number of pages
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  • Univerzita Komenského v Bratislave
https://schema.org/isbn
  • 978-80-89186-13-6
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  • 14310
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