About: Energy distribution functions of ions impinging on substrate in microwave plasma     Goto   Sponge   Distinct   Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

AttributesValues
rdf:type
Description
  • Rozdelovaci funkce iontu dopadajicich na substart v mikrovlnnem plazmatu (cs)
  • Energy distribution functions of ions impinging on substrate in microwave plasma
  • Energy distribution functions of ions impinging on substrate in microwave plasma (en)
Title
  • Rozdelovaci funkce iontu dopadajicich na substart v mikrovlnnem plazmatu (cs)
  • Energy distribution functions of ions impinging on substrate in microwave plasma
  • Energy distribution functions of ions impinging on substrate in microwave plasma (en)
skos:prefLabel
  • Rozdelovaci funkce iontu dopadajicich na substart v mikrovlnnem plazmatu (cs)
  • Energy distribution functions of ions impinging on substrate in microwave plasma
  • Energy distribution functions of ions impinging on substrate in microwave plasma (en)
skos:notation
  • RIV/00216224:14310/04:00010375!RIV08-MSM-14310___
http://linked.open.../vavai/riv/strany
  • 438-444
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM 143100003)
http://linked.open...iv/cisloPeriodika
  • 3
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 562871
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/04:00010375
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • IEDF; large area microwave plasma; sheath (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV
  • [07FD7908D2BF]
http://linked.open...i/riv/nazevZdroje
  • Journal of physics D: Applied physics
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 37
http://linked.open...iv/tvurceVysledku
  • Kudrle, Vít
  • Meško, Marcel
  • Fujita, H.
  • Cicman, Peter
  • Ohtsu, Y.
http://linked.open...n/vavai/riv/zamer
issn
  • 0022-3727
number of pages
http://localhost/t...ganizacniJednotka
  • 14310
Faceted Search & Find service v1.16.118 as of Jun 21 2024


Alternative Linked Data Documents: ODE     Content Formats:   [cxml] [csv]     RDF   [text] [turtle] [ld+json] [rdf+json] [rdf+xml]     ODATA   [atom+xml] [odata+json]     Microdata   [microdata+json] [html]    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 78 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software