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Description
  • The JRP focuses on the calibration of motion systems with high uncertainty requirements and the development of methods for the analysis of the associated measurement uncertainty as well as methods for error mapping for real time corrections. Different approaches and instrumentation developed for the measurement of 6DoF motions as well as important aspects of motion systems like straightness and orthogonality will be analysed and compared. Additionally this JRP aims to improve nano positioning systems for the various relevant future high-tech fields, not only by novel hardware technology but also by optimised sensor and actuator components as well as optimised measurement and control strategies. The project is organised in three workpackages: Development and optimisation of interferometric sensors for traceable measurement of position, angle and straightness in cartesian motion systems with uncertainties in the nanometre range. Development and comparison of methods and instruments for straightness and orthogonality measurement Characterisation of motion systems in 6DoF. This workpackage includes the characterisation of motion stages for nanometrology with uncertainties down to the sub-nanometre range as well as those positioning devices with large angular motion possibilities.
  • The JRP focuses on the calibration of motion systems with high uncertainty requirements and the development of methods for the analysis of the associated measurement uncertainty as well as methods for error mapping for real time corrections. Different approaches and instrumentation developed for the measurement of 6DoF motions as well as important aspects of motion systems like straightness and orthogonality will be analysed and compared. Additionally this JRP aims to improve nano positioning systems for the various relevant future high-tech fields, not only by novel hardware technology but also by optimised sensor and actuator components as well as optimised measurement and control strategies. The project is organised in three workpackages: Development and optimisation of interferometric sensors for traceable measurement of position, angle and straightness in cartesian motion systems with uncertainties in the nanometre range. Development and comparison of methods and instruments for straightness and orthogonality measurement Characterisation of motion systems in 6DoF. This workpackage includes the characterisation of motion stages for nanometrology with uncertainties down to the sub-nanometre range as well as those positioning devices with large angular motion possibilities. (en)
Title
  • Metrology for movement and positioning in six degrees of freedom
  • Metrology for movement and positioning in six degrees of freedom (en)
skos:notation
  • 7AX13020
http://linked.open...avai/cep/aktivita
http://linked.open...kovaStatniPodpora
http://linked.open...ep/celkoveNaklady
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  • metrology; six degrees of freedom (en)
http://linked.open...ep/partnetrHlavni
http://linked.open...inujicichPrijemcu
http://linked.open...cep/pocetPrijemcu
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http://linked.open...n/vavai/cep/vyzva
http://linked.open.../cep/klicoveSlovo
  • metrology
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