About: Low Temperature Plasma Deposition of Perovskite Thin Films on Base Metal and Polymer Substrates

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About: Low Temperature Plasma Deposition of Perovskite Thin Films on Base Metal and Polymer Substrates Goto Sponge Distinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Projekt, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	http://linked.opendata.cz/ontology/domain/vavai/Projekt
Description	Hlavním cílem projektu je vývoj a optimalizace systému plazma jet pro depozici vysoce kvalitních perovskitových vrstev na kovové a polymerní substráty. (cs) The deposition of complex oxides on base metal and polymer substrates provides an important extension of thin film technology to more device-compatible substrate materials for application such as base metal foils and polymer sheets. The proposed project deals with the research and optimization of a plasma-jet technology for low temperature deposition of perovskite thin films on metal foils and electroded polymer substrates. In situ plasma diagnostic in the deposition system based on emission spectroscopy, Langmuir time-resolved probe measurements and mass spectrometry will be realized for better understanding of elementary processes in the reactive plasma. In order to get more insight into the physical and chemical interaction between the deposited film and the substrate at low deposition temperatures, film microstructure and composition characterization will be performed by XRD, XPS, GD-OES, SIMS, SEM, and TEM. Optical, dielectric and photoelectric properties will be evaluated by ellipsomery, spectrophotometry and dielectric measurement system, ferroelectric properties by P-E and C-V hysteresis measurements, domain structure and piezoelectric properties by AFM. Depth profiling of physical properties will be performed by nanoindentation (elastic properties), VASE (optical properties) and LIMM (spontaneous polarization). Device concepts will be developed and device demonstrators will be assembled. (en)
Title	Nízkoteplotní plazmová depozice perovskitových tenkých vrstev na kovové a polymerní substráty (cs) Low Temperature Plasma Deposition of Perovskite Thin Films on Base Metal and Polymer Substrates (en)
http://linked.open...vai/cislo-smlouvy	http://linked.opendata.cz/resource/domain/vavai/cep/smlouva/202/09/J017
http://linked.open...lsi-vedlejsi-obor	http://linked.opendata.cz/resource/domain/vavai/cep/obor/BM
http://linked.open...avai/druh-souteze	http://linked.opendata.cz/resource/domain/vavai/cep/druh-souteze/VS
http://linked.open...domain/vavai/faze	http://linked.opendata.cz/resource/domain/vavai/cep/faze/53222130
http://linked.open...vavai/hlavni-obor	http://linked.opendata.cz/resource/domain/vavai/cep/obor/BL
http://linked.open...vai/vedlejsi-obor	http://linked.opendata.cz/resource/domain/vavai/cep/obor/JA
http://linked.open...vavai/id-aktivity	http://linked.opendata.cz/resource/domain/vavai/cep/aktivita/GC
http://linked.open.../vavai/id-souteze	http://linked.opendata.cz/resource/domain/vavai/cep/soutez/SGA02009GA1GC
http://linked.open...n/vavai/kategorie	http://linked.opendata.cz/resource/domain/vavai/cep/kategorie/1
http://linked.open...vai/klicova-slova	perovskitové vrstvy; rozprašování duté katody; plazmová tryska; kovové a polymerní substráty (en)
http://linked.open...avai/konec-reseni	2011-12-31 (xsd:date)
http://linked.open...nujicich-prijemcu	0 (xsd:integer)
http://linked.open...avai/poskytovatel	http://linked.opendata.cz/resource/domain/vavai/cep/poskytovatel/GA0
http://linked.open...avai/start-reseni	2009-01-01 (xsd:date)
http://linked.open...ai/statni-podpora	2734 (xsd:integer)
http://linked.open...vavai/typProjektu	http://linked.opendata.cz/resource/domain/vavai/cep/typ/P
http://linked.open...ai/uznane-naklady	2734 (xsd:integer)
http://linked.open...ai/pocet-prijemcu	1 (xsd:integer)
http://linked.open...cet-spoluprijemcu	0 (xsd:integer)
http://linked.open...ai/pocet-vysledku	17 (xsd:integer)
http://linked.open...ku-zverejnovanych	17 (xsd:integer)
is http://linked.open...ain/vavai/projekt of	http://linked.opendata.cz/resource/domain/vavai/cep/ucast/2009/GC202/09/J017/ico-68378271 http://linked.opendata.cz/resource/domain/vavai/cep/ucast/2010/GC202/09/J017/ico-68378271 http://linked.opendata.cz/resource/domain/vavai/cep/ucast/2011/GC202/09/J017/ico-68378271

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