About: Low Temperature Plasma Deposition of Perovskite Thin Films on Base Metal and Polymer Substrates     Goto   Sponge   Distinct   Permalink

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  • Hlavním cílem projektu je vývoj a optimalizace systému plazma jet pro depozici vysoce kvalitních perovskitových vrstev na kovové a polymerní substráty. (cs)
  • The deposition of complex oxides on base metal and polymer substrates provides an important extension of thin film technology to more device-compatible substrate materials for application such as base metal foils and polymer sheets. The proposed project deals with the research and optimization of a plasma-jet technology for low temperature deposition of perovskite thin films on  metal foils and electroded polymer substrates. In situ plasma diagnostic in the deposition system based on emission spectroscopy, Langmuir time-resolved probe measurements and mass spectrometry will be realized for better understanding of elementary processes in the reactive plasma. In order to get more insight into the physical and chemical interaction between the deposited film and the substrate at low deposition temperatures, film microstructure and composition characterization will be performed by XRD, XPS, GD-OES, SIMS, SEM, and TEM. Optical, dielectric and photoelectric properties will be evaluated by ellipsomery, spectrophotometry and dielectric measurement system, ferroelectric properties by P-E and C-V hysteresis measurements, domain structure and piezoelectric properties by AFM. Depth profiling of physical properties will be performed by nanoindentation (elastic properties), VASE (optical properties) and LIMM (spontaneous polarization). Device concepts will be developed and device demonstrators will be assembled. (en)
Title
  • Nízkoteplotní plazmová depozice perovskitových tenkých vrstev na kovové a polymerní substráty (cs)
  • Low Temperature Plasma Deposition of Perovskite Thin Films on Base Metal and Polymer Substrates (en)
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  • perovskitové vrstvy; rozprašování duté katody; plazmová tryska; kovové a polymerní substráty (en)
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