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Description
| - TiC/a-C nanocomposite films doped with CaO have been deposited by means of a hybrid PVD/PACVD technique, which combines dc magnetron sputtering of a TiC0.5+10% CaO target, with a subsequent high density inductively coupled plasma (ICP) in order to excite and ionize the sputtered species to a high degree. The films were characterized according to their morphology, structure and thickness by scanning electron microscopy, their composition and bonding structure by X-ray photoelectron spectroscopy, and their crystalline properties by X-ray diffraction. The films consist of fcc titanium carbide nanocrystallites with grain sizes of 5-15 nm and an amorphous carbon phase. The average composition is Ti0.43C0.35Ca0.02O0.15N0.05. The influence of the ICP plasma power and the bias voltage applied to the substrate on the major film properties has been investigated.
- TiC/a-C nanocomposite films doped with CaO have been deposited by means of a hybrid PVD/PACVD technique, which combines dc magnetron sputtering of a TiC0.5+10% CaO target, with a subsequent high density inductively coupled plasma (ICP) in order to excite and ionize the sputtered species to a high degree. The films were characterized according to their morphology, structure and thickness by scanning electron microscopy, their composition and bonding structure by X-ray photoelectron spectroscopy, and their crystalline properties by X-ray diffraction. The films consist of fcc titanium carbide nanocrystallites with grain sizes of 5-15 nm and an amorphous carbon phase. The average composition is Ti0.43C0.35Ca0.02O0.15N0.05. The influence of the ICP plasma power and the bias voltage applied to the substrate on the major film properties has been investigated. (en)
- Hybridní ICP-naprašování nanokompozitních vrstev TiC/CaO pro biomedicínské aplikace. (cs)
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Title
| - Hybrid ICP/Sputter Deposition of TiC/CaO Nanocomposite Films for Biomedical Application
- Hybrid ICP/Sputter Deposition of TiC/CaO Nanocomposite Films for Biomedical Application (en)
- Hybridní ICP-naprašování nanokompozitních vrstev TiC/CaO pro biomedicínské aplikace. (cs)
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skos:prefLabel
| - Hybrid ICP/Sputter Deposition of TiC/CaO Nanocomposite Films for Biomedical Application
- Hybrid ICP/Sputter Deposition of TiC/CaO Nanocomposite Films for Biomedical Application (en)
- Hybridní ICP-naprašování nanokompozitních vrstev TiC/CaO pro biomedicínské aplikace. (cs)
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skos:notation
| - RIV/68407700:21460/06:12117676!RIV08-MSM-21460___
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http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/68407700:21460/06:12117676
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - Nanocomposite Films; inductively coupled plasma (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...odStatuVydavatele
| - DE - Spolková republika Německo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
| - Applied Physics A: Materials Science and Processing
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...UplatneniVysledku
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http://linked.open...v/svazekPeriodika
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http://linked.open...iv/tvurceVysledku
| - Jelínek, Miroslav
- Rossi, F.
- Ceccone, G.
- Kulisch, W.
- Colpo, P.
- Gipson, P. N.
- Levashov, E. A.
- Philip, P. J. M.
- Shtansky, D. V.
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http://linked.open...n/vavai/riv/zamer
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issn
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number of pages
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http://localhost/t...ganizacniJednotka
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