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  • A capacitive humidity sensor includes a capacitor with two metallic electrodes. A moisture sensitive layer of tantalum pentoxide inserted between the electrodes serves as a dielectric. The dielectric is critical for humidity measurement in humidity sensors. In common humidity sensors of this kind, polymer film is used as the dielectric layer. Some of humidity sensors are using oxides layer on a metal like aluminum, tantalum etc, or a combination of these layers, as a dielectric in a capacitor. The electrode based on Ta/Ta2O5 layers could be used as a gate in MOSFET under the interdigital structure.
  • A capacitive humidity sensor includes a capacitor with two metallic electrodes. A moisture sensitive layer of tantalum pentoxide inserted between the electrodes serves as a dielectric. The dielectric is critical for humidity measurement in humidity sensors. In common humidity sensors of this kind, polymer film is used as the dielectric layer. Some of humidity sensors are using oxides layer on a metal like aluminum, tantalum etc, or a combination of these layers, as a dielectric in a capacitor. The electrode based on Ta/Ta2O5 layers could be used as a gate in MOSFET under the interdigital structure. (en)
Title
  • Preparation of tantalum pentoxide by anodic oxidation and its application for humidity sensors
  • Preparation of tantalum pentoxide by anodic oxidation and its application for humidity sensors (en)
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  • Preparation of tantalum pentoxide by anodic oxidation and its application for humidity sensors
  • Preparation of tantalum pentoxide by anodic oxidation and its application for humidity sensors (en)
skos:notation
  • RIV/68407700:21220/11:00204661!RIV13-MSM-21220___
http://linked.open...avai/riv/aktivita
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  • 223104
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  • RIV/68407700:21220/11:00204661
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  • anodic oxidation; tantalum pentoxide; humidity sensor (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [6997F8B3E273]
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  • Brno
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  • Ostrava
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  • NANOCON 2011 - Conference Proceedings
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  • Chren, Dominik
  • Sopko, Bruno
  • Vlk, Josef
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  • 000306686700090
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  • TANGEr, spol. s r.o.
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  • 978-80-87294-27-7
http://localhost/t...ganizacniJednotka
  • 21220
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