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rdf:type
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Description
| - The composition, optical and mechanical propertiesf the CNxHy films deposited at various process conditions were investigated by electron microprobe analysis, IR spectroscopy and microhardness measurements.
- The composition, optical and mechanical propertiesf the CNxHy films deposited at various process conditions were investigated by electron microprobe analysis, IR spectroscopy and microhardness measurements. (en)
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Title
| - CN x H y films obtained by ECR plasma activated CVD: the role of substrate bias (DC, RF) and some other deposition parameters in growth mechanism.
- CN x H y films obtained by ECR plasma activated CVD: the role of substrate bias (DC, RF) and some other deposition parameters in growth mechanism. (en)
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skos:prefLabel
| - CN x H y films obtained by ECR plasma activated CVD: the role of substrate bias (DC, RF) and some other deposition parameters in growth mechanism.
- CN x H y films obtained by ECR plasma activated CVD: the role of substrate bias (DC, RF) and some other deposition parameters in growth mechanism. (en)
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skos:notation
| - RIV/68378271:_____/99:02000057!RIV/2003/AV0/A02003/N
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http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(IAA1010827), Z(AV0Z1010914)
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
| |
http://linked.open...dnocenehoVysledku
| |
http://linked.open...ai/riv/idVysledku
| - RIV/68378271:_____/99:02000057
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
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http://linked.open.../riv/klicoveSlovo
| |
http://linked.open...odStatuVydavatele
| - CH - Švýcarská konfederace
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
| - Surface and Coatings Technology
|
http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
| |
http://linked.open...cetTvurcuVysledku
| |
http://linked.open...ocetUcastnikuAkce
| |
http://linked.open...nichUcastnikuAkce
| |
http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...v/svazekPeriodika
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http://linked.open...iv/tvurceVysledku
| - Jastrabík, Lubomír
- Musil, Jindřich
- Fendrych, František
- Soukup, Ladislav
- Shaginyan, L. R.
- Kulikovsky, V. Yu.
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http://linked.open...n/vavai/riv/zamer
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issn
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number of pages
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