About: In situ focus characterization by ablation technique to enable optics alignment at an XUV FEL source     Goto   Sponge   Distinct   Permalink

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  • In situ focus characterization is demonstrated by working at an extreme ultraviolet (XUV) free-electron laser source using ablation technique. Design of the instrument reported here allows reaching a few micrometres resolution along with keeping the ultrahigh vacuum conditions and ensures high-contrast visibility of ablative imprints on optically transparent samples, e.g., PMMA. This enables on-line monitoring of the beam profile changes and thus makes possible in situ alignment of the XUV focusing optics. A good agreement between focal characterizations retrieved from in situ inspection of ablative imprints contours and from well-established accurate ex situ analysis with Nomarski microscope has been observed for a typical micro-focus experiment.
  • In situ focus characterization is demonstrated by working at an extreme ultraviolet (XUV) free-electron laser source using ablation technique. Design of the instrument reported here allows reaching a few micrometres resolution along with keeping the ultrahigh vacuum conditions and ensures high-contrast visibility of ablative imprints on optically transparent samples, e.g., PMMA. This enables on-line monitoring of the beam profile changes and thus makes possible in situ alignment of the XUV focusing optics. A good agreement between focal characterizations retrieved from in situ inspection of ablative imprints contours and from well-established accurate ex situ analysis with Nomarski microscope has been observed for a typical micro-focus experiment. (en)
Title
  • In situ focus characterization by ablation technique to enable optics alignment at an XUV FEL source
  • In situ focus characterization by ablation technique to enable optics alignment at an XUV FEL source (en)
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  • In situ focus characterization by ablation technique to enable optics alignment at an XUV FEL source
  • In situ focus characterization by ablation technique to enable optics alignment at an XUV FEL source (en)
skos:notation
  • RIV/68378271:_____/13:00395140!RIV14-MSM-68378271
http://linked.open...avai/riv/aktivita
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  • I, P(ED1.1.00/02.0061), P(EE.2.3.20.0087), P(EE2.3.30.0057), P(GA13-28721S), P(GAP108/11/1312), P(GAP205/11/0571), P(GAP208/10/2302), P(LG13029)
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  • 6
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  • 79385
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  • RIV/68378271:_____/13:00395140
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  • free electron lasers; laser ablation; laser beams; optical focusing; ultraviolet sources (en)
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  • US - Spojené státy americké
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  • [6280D6363353]
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  • Review of Scientific Instruments
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  • 84
http://linked.open...iv/tvurceVysledku
  • Chalupský, Jaromír
  • Hájková, Věra
  • Juha, Libor
  • Vyšín, Luděk
  • Dziarzhytski, S.
  • Gerasimova, N.
  • Weigelt, H.
http://linked.open...ain/vavai/riv/wos
  • 000321273500050
issn
  • 0034-6748
number of pages
http://bibframe.org/vocab/doi
  • 10.1063/1.4807896
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