About: Investigation of the time evolution of plasma parameters in a pulsed magnetron discharge     Goto   Sponge   Distinct   Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

AttributesValues
rdf:type
Description
  • DC pulse magnetron discharge with Ti target in Ar and Ar/O2 working gases was investigated by means of time resolved Lagmuir probe diagnostics. We have used in our work very low average DC discharge current up to 1 A but high instant discharge current about 10 A in the active part of pulse cycle. The experiments were carried out under higher pressures (up to 15 Pa) than usual. Temporal evolutions of internal plasma parameters such as electron density, elektron temperature, plasma potential and EEPF are determined from the time-resolved probe data as dependences on pressure
  • DC pulse magnetron discharge with Ti target in Ar and Ar/O2 working gases was investigated by means of time resolved Lagmuir probe diagnostics. We have used in our work very low average DC discharge current up to 1 A but high instant discharge current about 10 A in the active part of pulse cycle. The experiments were carried out under higher pressures (up to 15 Pa) than usual. Temporal evolutions of internal plasma parameters such as electron density, elektron temperature, plasma potential and EEPF are determined from the time-resolved probe data as dependences on pressure (en)
Title
  • Investigation of the time evolution of plasma parameters in a pulsed magnetron discharge
  • Investigation of the time evolution of plasma parameters in a pulsed magnetron discharge (en)
skos:prefLabel
  • Investigation of the time evolution of plasma parameters in a pulsed magnetron discharge
  • Investigation of the time evolution of plasma parameters in a pulsed magnetron discharge (en)
skos:notation
  • RIV/68378271:_____/06:00097902!RIV12-AV0-68378271
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA202/05/2242), P(GA202/06/0776), Z(AV0Z10100522), Z(MSM0021620834)
http://linked.open...iv/cisloPeriodika
  • -
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 480368
http://linked.open...ai/riv/idVysledku
  • RIV/68378271:_____/06:00097902
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • pulsed magnetron; time resolved measurements; Langmuir probe (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • CZ - Česká republika
http://linked.open...ontrolniKodProRIV
  • [A4DC46CFD65F]
http://linked.open...i/riv/nazevZdroje
  • Czechoslovak Journal of Physics
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 56
http://linked.open...iv/tvurceVysledku
  • Hubička, Zdeněk
  • Hippler, R.
  • Straňák, V.
  • Blažek, J.
  • Tichý, M.
  • Špatenka, P.
  • Adámek, P.
  • Wrehde, S.
http://linked.open...ain/vavai/riv/wos
  • 000241337100017
http://linked.open...n/vavai/riv/zamer
issn
  • 0011-4626
number of pages
Faceted Search & Find service v1.16.118 as of Jun 21 2024


Alternative Linked Data Documents: ODE     Content Formats:   [cxml] [csv]     RDF   [text] [turtle] [ld+json] [rdf+json] [rdf+xml]     ODATA   [atom+xml] [odata+json]     Microdata   [microdata+json] [html]    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 82 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software