About: Imaging of specimens at optimized low and very low energies in scanning electron microscopy.     Goto   Sponge   Distinct   Permalink

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  • A modern trend toward low electron energies in scanning electron microscopy (SEM), characterised by lowering the acceleration voltages in low voltage SEM (LVSEM) or by utilising a retarding-field optical element in low energy SEM (LESEM), makes the energy range where new contrasts appear accessible. This range is further extended by a cathode-lens equipped scanning low energy electron microscope (SLEEM) which achieves nearly constant spatial resolution throughout the energy scale. This enables one to optimise freely the electron beam energy according to the ask. At low energies, classes of image contrast exist that make visitable particular specimen data most effectively or even exclusively within certain energy intervals or at certain energy values only. Some contrasts are well understood and can already be utilised for practical surface examinations but others are not yet reliably explained and complementary experiments are needed.
  • A modern trend toward low electron energies in scanning electron microscopy (SEM), characterised by lowering the acceleration voltages in low voltage SEM (LVSEM) or by utilising a retarding-field optical element in low energy SEM (LESEM), makes the energy range where new contrasts appear accessible. This range is further extended by a cathode-lens equipped scanning low energy electron microscope (SLEEM) which achieves nearly constant spatial resolution throughout the energy scale. This enables one to optimise freely the electron beam energy according to the ask. At low energies, classes of image contrast exist that make visitable particular specimen data most effectively or even exclusively within certain energy intervals or at certain energy values only. Some contrasts are well understood and can already be utilised for practical surface examinations but others are not yet reliably explained and complementary experiments are needed. (en)
Title
  • Imaging of specimens at optimized low and very low energies in scanning electron microscopy.
  • Imaging of specimens at optimized low and very low energies in scanning electron microscopy. (en)
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  • Imaging of specimens at optimized low and very low energies in scanning electron microscopy.
  • Imaging of specimens at optimized low and very low energies in scanning electron microscopy. (en)
skos:notation
  • RIV/68081731:_____/99:12020094!RIV/2003/AV0/A12003/N
http://linked.open.../vavai/riv/strany
  • 7 ; 22
http://linked.open...avai/riv/aktivita
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  • P(GA202/95/0280), P(GA202/96/0961), P(IAA2065502), Z(AV0Z2065902)
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  • 1
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  • 742365
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  • RIV/68081731:_____/99:12020094
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  • contrast mechanisms; scanning electron microscope; low electron energies (en)
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  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [72EFB1E83F3B]
http://linked.open...i/riv/nazevZdroje
  • Scanning Microscopy
http://linked.open...in/vavai/riv/obor
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http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 13
http://linked.open...iv/tvurceVysledku
  • Müllerová, Ilona
http://linked.open...n/vavai/riv/zamer
issn
  • 0891-7035
number of pages
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