About: Displacement interferometry with stabilization of wavelength in air

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We present a concept of suppression of the influence of variations of the refractive index of air in displacement measuring interferometry. The principle is based on referencing of wavelength of the coherent laser source in atmospheric conditions instead of traditional stabilization of the optical frequency and indirect evaluation of the refractive index of air. The key advantage is in identical beam paths of the position measuring interferometers and the interferometer used for the wavelength stabilization. Design of the optical arrangement presented here to verify the concept is suitable for real interferometric position sensing in technical practice especially where a high resolution measurement within some limited range in atmospheric conditions is needed, e.g. in nanometrology. We present a concept of suppression of the influence of variations of the refractive index of air in displacement measuring interferometry. The principle is based on referencing of wavelength of the coherent laser source in atmospheric conditions instead of traditional stabilization of the optical frequency and indirect evaluation of the refractive index of air. The key advantage is in identical beam paths of the position measuring interferometers and the interferometer used for the wavelength stabilization. Design of the optical arrangement presented here to verify the concept is suitable for real interferometric position sensing in technical practice especially where a high resolution measurement within some limited range in atmospheric conditions is needed, e.g. in nanometrology. (en)
Title	Displacement interferometry with stabilization of wavelength in air Displacement interferometry with stabilization of wavelength in air (en)
skos:prefLabel	Displacement interferometry with stabilization of wavelength in air Displacement interferometry with stabilization of wavelength in air (en)
skos:notation	RIV/68081731:_____/12:00385285!RIV13-GA0-68081731
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(ED0017/01/01), P(GA102/09/1276), P(GPP102/11/P820), P(TA02010711), P(TE01020233)
http://linked.open...iv/cisloPeriodika	25
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Buchta, Zdeněk Čížek, Martin Hrabina, Jan Číp, Ondřej Lazar, Josef Holá, Miroslava
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	131540
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/12:00385285
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	interferometry; instrumentation; measurement, and metrology (en)
http://linked.open.../riv/klicoveSlovo	instrumentation measurement interferometry and metrology
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[987A660DF74D]
http://linked.open...i/riv/nazevZdroje	Optics Express
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	6 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Advanced Microscopy and Spectroscopy Platform for Research and Development in Nano and Microtechnologies - AMISPEC APPLICATION LABORATORIES OF ADVANCED MICROTECHNOLOGIES AND NANOTECHNOLOGIES Interferometer with full in-line compensation of the fluctuations of refractive index Interferometric measurement techniques for nanopositioning Advanced interferometric systems for measurement in nanotechnology
http://linked.open...UplatneniVysledku	2012
http://linked.open...v/svazekPeriodika	20
http://linked.open...iv/tvurceVysledku	Buchta, Zdeněk Hrabina, Jan Lazar, Josef Číp, Ondřej Čížek, Martin Holá, Miroslava
http://linked.open...ain/vavai/riv/wos	000314746600058
issn	1094-4087
number of pages	8 (xsd:int)
http://bibframe.org/vocab/doi	10.1364/OE.20.027830

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