About: Homogenization of CZ Si wafers by Tabula Rasa annealing

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The precipitation of interstitial oxygen in Czochralski grown silicon has been investigated by infrared absorption spectroscopy, chemical etching, TEM and X-ray diffraction after application of homogenization annealing process called Tabula Rasa. The precipitation of interstitial oxygen in Czochralski grown silicon has been investigated by infrared absorption spectroscopy, chemical etching, TEM and X-ray diffraction after application of homogenization annealing process called Tabula Rasa. (en)
Title	Homogenization of CZ Si wafers by Tabula Rasa annealing Homogenization of CZ Si wafers by Tabula Rasa annealing (en)
skos:prefLabel	Homogenization of CZ Si wafers by Tabula Rasa annealing Homogenization of CZ Si wafers by Tabula Rasa annealing (en)
skos:notation	RIV/68081723:_____/09:00332842!RIV10-AV0-68081723
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA202/09/1013), Z(AV0Z20410507), Z(MSM0021622410)
http://linked.open...iv/cisloPeriodika	-
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Buršík, Jiří
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav fyziky materiálů AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	317725
http://linked.open...ai/riv/idVysledku	RIV/68081723:_____/09:00332842
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	silicon; interstitial oxygen; oxygen precipitates (en)
http://linked.open.../riv/klicoveSlovo	oxygen precipitates silicon interstitial oxygen
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[75C3C7090C42]
http://linked.open...i/riv/nazevZdroje	Physica. B
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Nucleation and growth of oxygen precipitates in silicon
http://linked.open...UplatneniVysledku	2009
http://linked.open...v/svazekPeriodika	404
http://linked.open...iv/tvurceVysledku	Buršík, Jiří Caha, O. Kuběna, A. Meduňa, M. Kuběna, J.
http://linked.open...n/vavai/riv/zamer	Physical properties of advanced materials in relation to their microstructure and processing Physical and chemical properties of advanced materials and structures
issn	0921-4526
number of pages	4 (xsd:int)

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