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Description
  • The theoretical model of the evanescent waves coupling with dielectric and metallic strip gratings is described. The interaction of electromagnetic field with lamellar periodic structures and their diffraction properties are determined by coupled wave method implemented as the Fourier modal method. The simulations of the ellipsometric response under internal reflection for different geometrical and material configurations are presented. The attention is concentrated on the study of coupling strength influence, effects connected with stripes geometry, and, with absorption in metallic elements of grating.
  • The theoretical model of the evanescent waves coupling with dielectric and metallic strip gratings is described. The interaction of electromagnetic field with lamellar periodic structures and their diffraction properties are determined by coupled wave method implemented as the Fourier modal method. The simulations of the ellipsometric response under internal reflection for different geometrical and material configurations are presented. The attention is concentrated on the study of coupling strength influence, effects connected with stripes geometry, and, with absorption in metallic elements of grating. (en)
  • Je studován teoretický model vazby evanescentní vlny na dielektrické a metalické páskové mřížce. Interakce elektromagnetické vlny s periodickou strukturou je modelována metodou vázaných vln implementovanou jako Fourierova modální metoda. Jsou prezentovány simulace elipsometrické odezvy při různých geometrických a materiálových konfiguracích. (cs)
Title
  • Total internal reflection ellipsometry of periodic structures
  • Total internal reflection ellipsometry of periodic structures (en)
  • Elipsometrie při úplném vnitřním odrazu od periodické struktury (cs)
skos:prefLabel
  • Total internal reflection ellipsometry of periodic structures
  • Total internal reflection ellipsometry of periodic structures (en)
  • Elipsometrie při úplném vnitřním odrazu od periodické struktury (cs)
skos:notation
  • RIV/61989100:27600/06:00013523!RIV07-GA0-27600___
http://linked.open.../vavai/riv/strany
  • 1-5
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(1P05ME768), P(GA202/03/0776), S
http://linked.open...iv/cisloPeriodika
  • 6180
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 504022
http://linked.open...ai/riv/idVysledku
  • RIV/61989100:27600/06:00013523
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • TIRE; lamellar periodic structure (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [213D450BDC7B]
http://linked.open...i/riv/nazevZdroje
  • Proceedings of SPIE
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 2006
http://linked.open...iv/tvurceVysledku
  • Hlubina, Petr
  • Pištora, Jaromír
  • Vlček, Jaroslav
  • Životský, Ondřej
  • Foldyna, Martin
issn
  • 0277-786X
number of pages
http://localhost/t...ganizacniJednotka
  • 27600
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