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Description
| - The article reports on dc pulsed reactive sputtering of two-phase single layer Al-O-N nanocomposite films using dual magnetron in a mixture of N2+O2 with pulsed inlet of oxygen. Two kinds of nanocomposite films weresputtered: (1) nc-AlN/a-(Al-O-N) film and (2) nc-(gamma-Al2O3)/a-(Al-O-N) nanocomposite film; here nc- and a- denotes the nanocrystalline and amorphous phase, respectively. The transition from the nc-AlN/a-(Al-O-N) nanocomposite to the nc-(gamma-Al2O3)/a-(Al-O-N) nanocomposite was controlled by the length of the period of oxygen pulses. It was found that both nanocomposites are highly elastic films with relatively high hardness H = 15 to 20 GPa, low effective Young's modulus E* satisfying the condition that the ratio H/E* } 0.1,high elastic recovery We } 60% and high resistance to cracking in bending. Correlations between the film structure and its mechanical properties are discussed in detail.
- The article reports on dc pulsed reactive sputtering of two-phase single layer Al-O-N nanocomposite films using dual magnetron in a mixture of N2+O2 with pulsed inlet of oxygen. Two kinds of nanocomposite films weresputtered: (1) nc-AlN/a-(Al-O-N) film and (2) nc-(gamma-Al2O3)/a-(Al-O-N) nanocomposite film; here nc- and a- denotes the nanocrystalline and amorphous phase, respectively. The transition from the nc-AlN/a-(Al-O-N) nanocomposite to the nc-(gamma-Al2O3)/a-(Al-O-N) nanocomposite was controlled by the length of the period of oxygen pulses. It was found that both nanocomposites are highly elastic films with relatively high hardness H = 15 to 20 GPa, low effective Young's modulus E* satisfying the condition that the ratio H/E* } 0.1,high elastic recovery We } 60% and high resistance to cracking in bending. Correlations between the film structure and its mechanical properties are discussed in detail. (en)
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Title
| - Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking
- Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking (en)
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skos:prefLabel
| - Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking
- Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking (en)
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skos:notation
| - RIV/49777513:23520/12:43915258!RIV13-GA0-23520___
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/49777513:23520/12:43915258
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - Pulsed inlet of oxygen; Reactive sputtering; Mechanical properties; Al-based composites; Oxynitride; Two-phase nanocomposites (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...odStatuVydavatele
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
| - Surface and Coatings Technology
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...v/svazekPeriodika
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http://linked.open...iv/tvurceVysledku
| - Musil, Jindřich
- Meissner, Michal
- Tölg, Tomáš
- Čerstvý, Radomír
- Jílek, Richard
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http://linked.open...ain/vavai/riv/wos
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issn
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number of pages
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http://bibframe.org/vocab/doi
| - 10.1016/j.surfcoat.2012.04.028
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http://localhost/t...ganizacniJednotka
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