About: High-temperature stability of the mechanical and optical properties of Si-B-C-N films prepared by magnetron sputtering

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Amorphous Si-B-C-N films with two compositions (Si34B9C4N49 and Si36B13C7N40) and low contamination level (H+O+Ar < 4 at.%) were deposited on silicon substrates by reactive dc magnetron co-sputtering using two different targets and gas mixtures. Thermal stability of these films was investigated in terms of composition, bonding structure, as well as mechanical and optical properties after annealing in helium up to the 1300°C substrate limit. Furthermore, both Si-B-C-N materials studied here exhibited extremely high oxidation resistance in air up to the 1300°C substrate limit. Amorphous Si-B-C-N films with two compositions (Si34B9C4N49 and Si36B13C7N40) and low contamination level (H+O+Ar < 4 at.%) were deposited on silicon substrates by reactive dc magnetron co-sputtering using two different targets and gas mixtures. Thermal stability of these films was investigated in terms of composition, bonding structure, as well as mechanical and optical properties after annealing in helium up to the 1300°C substrate limit. Furthermore, both Si-B-C-N materials studied here exhibited extremely high oxidation resistance in air up to the 1300°C substrate limit. (en)
Title	High-temperature stability of the mechanical and optical properties of Si-B-C-N films prepared by magnetron sputtering High-temperature stability of the mechanical and optical properties of Si-B-C-N films prepared by magnetron sputtering (en)
skos:prefLabel	High-temperature stability of the mechanical and optical properties of Si-B-C-N films prepared by magnetron sputtering High-temperature stability of the mechanical and optical properties of Si-B-C-N films prepared by magnetron sputtering (en)
skos:notation	RIV/49777513:23520/09:00501690!RIV10-MSM-23520___
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(MSM4977751302)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Hřeben, Stanislav Vlček, Jaroslav Kalaš, Jiří
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Fakulta aplikovaných věd
http://linked.open...dnocenehoVysledku	317184
http://linked.open...ai/riv/idVysledku	RIV/49777513:23520/09:00501690
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Si-B-C-N films; magnetron co-sputtering; bonding structure; hardness; optical properties; thermal stability (en)
http://linked.open.../riv/klicoveSlovo	hardness optical properties thermal stability bonding structure Si-B-C-N films magnetron co-sputtering
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[052488572CE1]
http://linked.open...i/riv/nazevZdroje	Thin Solid Films
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...UplatneniVysledku	2009
http://linked.open...v/svazekPeriodika	518
http://linked.open...iv/tvurceVysledku	Vlček, Jaroslav Martinů, Ludvík Hřeben, Stanislav Kalaš, Jiří Klemberg-Sapieha, Jolanta Vernhes, Richard
http://linked.open...ain/vavai/riv/wos	000270628800030
http://linked.open...n/vavai/riv/zamer	Procesy ve výbojovém plazmatu a nové tenkovrstvé materiály s unikátními vlastnostmi
issn	0040-6090
number of pages	6 (xsd:int)
http://localhost/t...ganizacniJednotka	23520

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