About: Mechanical and optical properties of quaternary Si-B-C-N films prepared by reactive magnetron sputtering     Goto   Sponge   Distinct   Permalink

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Description
  • Metodou reaktivního magnetronového naprašování byly připraveny vrstvy systému Si-B-C-N. Práce se zaměřuje na hledání vztahů mezi procesními parametry, prvkovým složením, vazebnou strukturou a mechanickými, tribologickými a optickými vlastnostmi připravených materiálů. Vrstvy vykazují vysokou tvrdost (do 36 GPa), dobrou adhezi k substrátu Si(100) při nízkém tlakovém pnutí (1.0-1.6 GPa), index lomu od 1.8 do 2.2 (při 550 nm) a extinkční koeficient od 2 x 10%224 do 0.3. Díky těmto vlastnostem jsou vrstvy Si-B-C-N vhodné pro použití v tribologických a optoelektronických aplikacích. (cs)
  • Quaternary Si-B-C-N films were prepared using reactive direct current magnetron co-sputtering. We focused on complex relationships between process parameters, elemental composition, bonding structure, and mechanical, tribological and optical properties of the deposited materials. The films exhibit a high hardness (up to 36 GPa) and a good adhesion to Si(100) substrates at a low compressive stress (1.0-1.6 GPa), refractive index ranging from 1.8 to 2.2 (at 550 nm) and an extinction coefficient between 2 x 10%224 and 0.3. The Si-B-C-N films appear attractive for both tribological and optoelectronic applications.
  • Quaternary Si-B-C-N films were prepared using reactive direct current magnetron co-sputtering. We focused on complex relationships between process parameters, elemental composition, bonding structure, and mechanical, tribological and optical properties of the deposited materials. The films exhibit a high hardness (up to 36 GPa) and a good adhesion to Si(100) substrates at a low compressive stress (1.0-1.6 GPa), refractive index ranging from 1.8 to 2.2 (at 550 nm) and an extinction coefficient between 2 x 10%224 and 0.3. The Si-B-C-N films appear attractive for both tribological and optoelectronic applications. (en)
Title
  • Mechanical and optical properties of quaternary Si-B-C-N films prepared by reactive magnetron sputtering
  • Mechanical and optical properties of quaternary Si-B-C-N films prepared by reactive magnetron sputtering (en)
  • Mechanické a optické vlastnosti vrstev kvaternárního systému Si-B-C-N (cs)
skos:prefLabel
  • Mechanical and optical properties of quaternary Si-B-C-N films prepared by reactive magnetron sputtering
  • Mechanical and optical properties of quaternary Si-B-C-N films prepared by reactive magnetron sputtering (en)
  • Mechanické a optické vlastnosti vrstev kvaternárního systému Si-B-C-N (cs)
skos:notation
  • RIV/49777513:23520/08:00500501!RIV09-MSM-23520___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM4977751302)
http://linked.open...iv/cisloPeriodika
  • 21
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 378233
http://linked.open...ai/riv/idVysledku
  • RIV/49777513:23520/08:00500501
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Si-B-C-N films; Magnetron sputtering; Elemental composition; Bonding structure; Tribological and optical properties; Hardness; Stress (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • NL - Nizozemsko
http://linked.open...ontrolniKodProRIV
  • [A899E14624F6]
http://linked.open...i/riv/nazevZdroje
  • Thin Solid Films
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 516
http://linked.open...iv/tvurceVysledku
  • Houška, Jiří
  • Vlček, Jaroslav
  • Potocký, Štěpán
  • Čížek, Jiří
  • Martinů, Ludvík
  • Soukup, Zbyněk
  • Kalaš, Jiří
  • Jedrzejowski, P.
  • Klemberg-Sapieha, J. E.
http://linked.open...ain/vavai/riv/wos
  • 000259727900004
http://linked.open...n/vavai/riv/zamer
issn
  • 0040-6090
number of pages
http://localhost/t...ganizacniJednotka
  • 23520
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