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| Description
| - High-power impulse magnetron sputter deposition of metallic films was investigated. Time-averaged mass spectroscopy was performed to provide information on the energy distribution of individual ions and the composition of total ion fluxes over a wide range of deposition conditions. Chromium and niobium targets were used, the repetition frequency was 50 Hz and 60 Hz, respectively, and argon pressures were 0.29 Pa and 2.7 Pa. The strong effect of the working gas pressure on the ion energy distribution was shown. For low pressure (0.29 Pa) the metal ion energy distribution reveals a significant high energy tail (up to 20 eV). At a high pressure (2.7 Pa), the high energy tail of metal ion energy distribution became negligible. The efficiency of the sputtering process and particle transport to the substrate decreased with increasing target power loading.
- High-power impulse magnetron sputter deposition of metallic films was investigated. Time-averaged mass spectroscopy was performed to provide information on the energy distribution of individual ions and the composition of total ion fluxes over a wide range of deposition conditions. Chromium and niobium targets were used, the repetition frequency was 50 Hz and 60 Hz, respectively, and argon pressures were 0.29 Pa and 2.7 Pa. The strong effect of the working gas pressure on the ion energy distribution was shown. For low pressure (0.29 Pa) the metal ion energy distribution reveals a significant high energy tail (up to 20 eV). At a high pressure (2.7 Pa), the high energy tail of metal ion energy distribution became negligible. The efficiency of the sputtering process and particle transport to the substrate decreased with increasing target power loading. (en)
- Byla zkoumána vysokovýkonová pulzní magnetronová depozice kovových filmů. Časově průměrovaná hmotnostní spektroskopie byla použita k získání informací o energiovém rozdělení jednotlivých iontů a o složení celkového iontového toku v širokém rozsahu depozičních podmínek. Byly použity chromové a niobové terče, opakovací frekvence byla 50 Hz a 60 Hz a tlak argonu 0.29 a 2.7 Pa. Byl ukázán silný vliv pracovního tlaku na energiové rozdělení iontů. Při nízkých tlacích (0.29Pa) energiové rozdělení kovových iontů vykazuje významný vysokoenergiový chvost (až do 20 eV). Při vysokém tlaku (2.7Pa) se vysokoenergiový chvost kovových iontů stává bezvýznamným. Efektivita rozprašovacího procesu a transportu částic klesá s rostoucím výkonem dodaným na terč. (cs)
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| Title
| - Ion energy distributions and efficiency of sputtering process in HIPIMS system
- Energiové rozdělení iontů a efektivita naprašování v HIPIMS systemu (cs)
- Ion energy distributions and efficiency of sputtering process in HIPIMS system (en)
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| skos:prefLabel
| - Ion energy distributions and efficiency of sputtering process in HIPIMS system
- Energiové rozdělení iontů a efektivita naprašování v HIPIMS systemu (cs)
- Ion energy distributions and efficiency of sputtering process in HIPIMS system (en)
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| skos:notation
| - RIV/49777513:23520/08:00500332!RIV09-MSM-23520___
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| http://linked.open...avai/riv/aktivita
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| http://linked.open...avai/riv/aktivity
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| http://linked.open...iv/cisloPeriodika
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| http://linked.open...vai/riv/dodaniDat
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| http://linked.open...aciTvurceVysledku
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| http://linked.open.../riv/druhVysledku
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| http://linked.open...iv/duvernostUdaju
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| http://linked.open...titaPredkladatele
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| http://linked.open...dnocenehoVysledku
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| http://linked.open...ai/riv/idVysledku
| - RIV/49777513:23520/08:00500332
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| http://linked.open...riv/jazykVysledku
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| http://linked.open.../riv/klicovaSlova
| - HIPIMS; mass spectroscopy; ion energy distribution; metallic deposition (en)
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| http://linked.open.../riv/klicoveSlovo
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| http://linked.open...odStatuVydavatele
| - GB - Spojené království Velké Británie a Severního Irska
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| http://linked.open...ontrolniKodProRIV
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| http://linked.open...i/riv/nazevZdroje
| - Journal of Physics D: Applied Physics
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| http://linked.open...in/vavai/riv/obor
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| http://linked.open...ichTvurcuVysledku
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| http://linked.open...cetTvurcuVysledku
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| http://linked.open...UplatneniVysledku
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| http://linked.open...v/svazekPeriodika
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| http://linked.open...iv/tvurceVysledku
| - Burcalová, Kristýna
- Ehiasarian, Arutiun
- Hecimovic, Ante
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| http://linked.open...ain/vavai/riv/wos
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| http://linked.open...n/vavai/riv/zamer
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| issn
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| number of pages
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| http://localhost/t...ganizacniJednotka
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