About: Optical emission spectroscopy and energy-resolved mass spectroscopy in pulsed dc magnetron discharges for ionized high-rate sputtering

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About: Optical emission spectroscopy and energy-resolved mass spectroscopy in pulsed dc magnetron discharges for ionized high-rate sputtering Goto Sponge Distinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The paper deals with pulsed dc magnetron discharges proposed for ionized and high-rate sputtering of thin films. Time-resolved optical emission spectroscopy was used to characterize the ionization degree of copper (target) and argon (working gas) atoms, and the relative density of copper atoms in front of a sputtered copper target and in a plasma bulk during pulses. Energy-resolved mass spetroscopy with time resolution was carried out in front of a substrate to investigate the energy distribution of copper and argon ions, and their fractions in ion fluxes on the grounded substrate. The paper deals with pulsed dc magnetron discharges proposed for ionized and high-rate sputtering of thin films. Time-resolved optical emission spectroscopy was used to characterize the ionization degree of copper (target) and argon (working gas) atoms, and the relative density of copper atoms in front of a sputtered copper target and in a plasma bulk during pulses. Energy-resolved mass spetroscopy with time resolution was carried out in front of a substrate to investigate the energy distribution of copper and argon ions, and their fractions in ion fluxes on the grounded substrate. (en)
Title	Optical emission spectroscopy and energy-resolved mass spectroscopy in pulsed dc magnetron discharges for ionized high-rate sputtering Optical emission spectroscopy and energy-resolved mass spectroscopy in pulsed dc magnetron discharges for ionized high-rate sputtering (en)
skos:prefLabel	Optical emission spectroscopy and energy-resolved mass spectroscopy in pulsed dc magnetron discharges for ionized high-rate sputtering Optical emission spectroscopy and energy-resolved mass spectroscopy in pulsed dc magnetron discharges for ionized high-rate sputtering (en)
skos:notation	RIV/49777513:23520/02:00070767!RIV/2003/MSM/235203/N
http://linked.open.../vavai/riv/strany	92
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(ME 203), Z(MSM 235200002)
http://linked.open...vai/riv/dodaniDat	2003
http://linked.open...aciTvurceVysledku	Leština, Jan Pajdarová, Andrea Dag Vlček, Jaroslav
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Západočeská univerzita v Plzni / Fakulta aplikovaných věd
http://linked.open...dnocenehoVysledku	657154
http://linked.open...ai/riv/idVysledku	RIV/49777513:23520/02:00070767
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	magnetron sputtering;optical emission spectroscopy (en)
http://linked.open.../riv/klicoveSlovo	magnetron sputtering optical emission spectroscopy
http://linked.open...ontrolniKodProRIV	[8E069195BF77]
http://linked.open...v/mistoKonaniAkce	Liverpool
http://linked.open...i/riv/mistoVydani	Liverpool
http://linked.open...i/riv/nazevZdroje	Optical emission spectroscopy and energy-resolved mass spectroscopy in pulsed dc magnetron discharges for ionized high-rate sputtering
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...ocetUcastnikuAkce	0 (xsd:int)
http://linked.open...nichUcastnikuAkce	0 (xsd:int)
http://linked.open...vavai/riv/projekt	http://linked.opendata.cz/resource/domain/vavai/projekt/ME%20203
http://linked.open...UplatneniVysledku	2002
http://linked.open...iv/tvurceVysledku	Vlček, Jaroslav Leština, Jan Pajdarová, Andrea Dagmar
http://linked.open...vavai/riv/typAkce	CST - Celostátní
http://linked.open.../riv/zahajeniAkce	2002-01-01 (xsd:date)
http://linked.open...n/vavai/riv/zamer	http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20235200002
number of pages	4 (xsd:int)
http://purl.org/ne...btex#hasPublisher	University of Liverpool
https://schema.org/isbn	0-9539105-1-2
http://localhost/t...ganizacniJednotka	23520

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