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rdf:type
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Description
| - Polished Silicon wafer with Advanced Epitaxial Layer (AEPI). Wafer diameter 200 mm. Localized Light Scatterers (LLS) 100% of Wafer - max. 30 Counts per wafer >0.30 um by laser scan, Localized Light Scatterers (LLS) 90% of Wafer - max. 20 Counts per wafer >0.30 um by laser scan, thickness variability max. 2%, resistivity variability max. 4%.
- Polished Silicon wafer with Advanced Epitaxial Layer (AEPI). Wafer diameter 200 mm. Localized Light Scatterers (LLS) 100% of Wafer - max. 30 Counts per wafer >0.30 um by laser scan, Localized Light Scatterers (LLS) 90% of Wafer - max. 20 Counts per wafer >0.30 um by laser scan, thickness variability max. 2%, resistivity variability max. 4%. (en)
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Title
| - Final Product Specification for 200 mm AEPI W814AXX Silicon Epitaxial Wafers
- Final Product Specification for 200 mm AEPI W814AXX Silicon Epitaxial Wafers (en)
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skos:prefLabel
| - Final Product Specification for 200 mm AEPI W814AXX Silicon Epitaxial Wafers
- Final Product Specification for 200 mm AEPI W814AXX Silicon Epitaxial Wafers (en)
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skos:notation
| - RIV/26821532:_____/13:#0000057!RIV13-MPO-26821532
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...onomickeParametry
| - Cana max. 100USD/200 mm AEPI desku
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/26821532:_____/13:#0000057
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http://linked.open...terniIdentifikace
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http://linked.open...riv/jazykVysledku
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http://linked.open...vai/riv/kategorie
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http://linked.open.../riv/klicovaSlova
| - Silicon wafer; Epitaxial layer; Epitaxial wafer; Thickness variability; Resistivity variability; Localized Light Scatterers (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...ontrolniKodProRIV
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http://linked.open.../licencniPoplatek
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...echnickeParametry
| - 200 mm AEPI, LLS 100% of wafer - max. 30 >0.30 um, LLS 90% of wafer - max. 20 >0.30 um, TTV AEPI max. 2%, RRV AEPI max. 4%.
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http://linked.open...iv/tvurceVysledku
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http://linked.open...avai/riv/vlastnik
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http://linked.open...itiJinymSubjektem
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