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  • This paper deals with structural and optical properties of sputtered thin yttrium-oxide layers. Yttrium oxide is one of the materials which can be used as the antireflection coating for silicon solar cells. Its advantages are mainly a good thermal stability and a suitable refraction index. The yttrium oxide layers were deposited by means of RF magnetron sputtering system in non-reactive mode from yttrium-oxide target. A main aim was focused on evaluation of deposited layers by using UV-VIS spectrophotometry.
  • This paper deals with structural and optical properties of sputtered thin yttrium-oxide layers. Yttrium oxide is one of the materials which can be used as the antireflection coating for silicon solar cells. Its advantages are mainly a good thermal stability and a suitable refraction index. The yttrium oxide layers were deposited by means of RF magnetron sputtering system in non-reactive mode from yttrium-oxide target. A main aim was focused on evaluation of deposited layers by using UV-VIS spectrophotometry. (en)
Title
  • Yttrium Oxide Layers for Antireflection Coating of Silicon Solar Cells
  • Yttrium Oxide Layers for Antireflection Coating of Silicon Solar Cells (en)
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  • Yttrium Oxide Layers for Antireflection Coating of Silicon Solar Cells
  • Yttrium Oxide Layers for Antireflection Coating of Silicon Solar Cells (en)
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  • RIV/00216305:26220/09:PU81713!RIV10-MSM-26220___
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  • 352193
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  • RIV/00216305:26220/09:PU81713
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  • yttrium oxide, magnetron sputtering, antireflection coating, optical properties (en)
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  • [CE10F0949762]
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  • Brno
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  • Brno
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  • EDS 09 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDINGS
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  • Hégr, Ondřej
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  • NOVPRESS s.r.o.
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  • 978-80-214-3933-7
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  • 26220
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