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rdf:type
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Description
| - We report on the deposition of screen-printed tin oxide films to fabricate micromachined gas sensors. While in drop-coated or screen-printed devices the deposition of the sensing layer is usually the last step of the process, here the screen-printing wasmade before the backside silicon etching. This procedure avoids damaging the sensor membrane during the active layer deposition, which results in a excellent yield. Results on the morphology and gas sensitivity of the sensors developed are shown and dis scussed.
- We report on the deposition of screen-printed tin oxide films to fabricate micromachined gas sensors. While in drop-coated or screen-printed devices the deposition of the sensing layer is usually the last step of the process, here the screen-printing wasmade before the backside silicon etching. This procedure avoids damaging the sensor membrane during the active layer deposition, which results in a excellent yield. Results on the morphology and gas sensitivity of the sensors developed are shown and dis scussed. (en)
- We report on the deposition of screen-printed tin oxide films to fabricate micromachined gas sensors. While in drop-coated or screen-printed devices the deposition of the sensing layer is usually the last step of the process, here the screen-printing wasmade before the backside silicon etching. This procedure avoids damaging the sensor membrane during the active layer deposition, which results in a excellent yield. Results on the morphology and gas sensitivity of the sensors developed are shown and dis scussed. (cs)
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Title
| - Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors
- Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors (en)
- Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors (cs)
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skos:prefLabel
| - Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors
- Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors (en)
- Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors (cs)
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skos:notation
| - RIV/00216305:26220/03:PU38706!RIV06-GA0-26220___
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http://linked.open.../vavai/riv/strany
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(GA102/00/0939), Z(MSM 262200022)
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/00216305:26220/03:PU38706
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - gas sensors, micro-hotplate, thick-film, thin-film (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...v/mistoKonaniAkce
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http://linked.open...i/riv/mistoVydani
| - Calella de la Costa, Barcelona, Spain
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http://linked.open...i/riv/nazevZdroje
| - 4th Conference on Electronic Devices
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Hubálek, Jaromír
- Llobet, Eduard
- Correig, Xavier
- Vilanova, Xavier
- Gracia, I.
- Malysz, Karel
- Ivanov, Peter
- Brezmes, Jesús
- Cané, Carlas
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http://linked.open...vavai/riv/typAkce
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http://linked.open.../riv/zahajeniAkce
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http://linked.open...n/vavai/riv/zamer
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number of pages
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http://purl.org/ne...btex#hasPublisher
| - Instituto de Microelectrónika de Barcelona CNM-CSIC
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https://schema.org/isbn
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http://localhost/t...ganizacniJednotka
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