About: Influence of deposition conditions on electrical and mechanical properties of Sm2O3 doped CeO2 thin films prepared by EB-PVD (+IBAD) methods part 2. Indentation hardness and effective elastic modulus     Goto   Sponge   Distinct   Permalink

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Description
  • The study of polycrystalline CeO2 + xSm2O3 (x = 0, 10.9–15.9 mol %) thin films deposited by Electron Beam Physical Vapour Deposition (EBPVD) and Ionic Beam Assisted Deposition (IBAD) techniques on the Si substrate was devoted to the influence of deposition conditions used, namely composition x, deposition temperature Tdep and Ar+ ion bombardment, on the (micro)hardness, Hpl and elastic modulus,Y with respect to the film structure and microstructure. These mechanical characteristics were investigated by the instrumented indentation technique as the functions of relative indentation depth hrel = hmax/t and the values obtained were compared with those obtained by the classical Vickers technique. Results of this study are described and discussed.
  • The study of polycrystalline CeO2 + xSm2O3 (x = 0, 10.9–15.9 mol %) thin films deposited by Electron Beam Physical Vapour Deposition (EBPVD) and Ionic Beam Assisted Deposition (IBAD) techniques on the Si substrate was devoted to the influence of deposition conditions used, namely composition x, deposition temperature Tdep and Ar+ ion bombardment, on the (micro)hardness, Hpl and elastic modulus,Y with respect to the film structure and microstructure. These mechanical characteristics were investigated by the instrumented indentation technique as the functions of relative indentation depth hrel = hmax/t and the values obtained were compared with those obtained by the classical Vickers technique. Results of this study are described and discussed. (en)
Title
  • Influence of deposition conditions on electrical and mechanical properties of Sm2O3 doped CeO2 thin films prepared by EB-PVD (+IBAD) methods part 2. Indentation hardness and effective elastic modulus
  • Influence of deposition conditions on electrical and mechanical properties of Sm2O3 doped CeO2 thin films prepared by EB-PVD (+IBAD) methods part 2. Indentation hardness and effective elastic modulus (en)
skos:prefLabel
  • Influence of deposition conditions on electrical and mechanical properties of Sm2O3 doped CeO2 thin films prepared by EB-PVD (+IBAD) methods part 2. Indentation hardness and effective elastic modulus
  • Influence of deposition conditions on electrical and mechanical properties of Sm2O3 doped CeO2 thin films prepared by EB-PVD (+IBAD) methods part 2. Indentation hardness and effective elastic modulus (en)
skos:notation
  • RIV/00216224:14310/13:00070881!RIV14-MSM-14310___
http://linked.open...avai/riv/aktivita
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  • I
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  • 7
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  • 79724
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  • RIV/00216224:14310/13:00070881
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  • mechanical properties; hardness; elastic modulus; nanoindentation; thin films; CeO2; Sm2O3; doping (en)
http://linked.open.../riv/klicoveSlovo
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  • RU - Ruská federace
http://linked.open...ontrolniKodProRIV
  • [8C9051B5F45D]
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  • Russian Journal of Electrochemistry
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  • 49
http://linked.open...iv/tvurceVysledku
  • Buršíková, Vilma
  • Mansilla, C.
  • Navrátil, Vladislav
  • Hartmanová, Marie
http://linked.open...ain/vavai/riv/wos
  • 000321773800003
issn
  • 1023-1935
number of pages
http://bibframe.org/vocab/doi
  • 10.1134/S1023193513070033
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  • 14310
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