About: INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Interesting properties of diamond-like carbon (DLC) coatings such as high hardness, low friction coefficient, high thermal conductivity and wide band gaps have increased the number of industrial partners to research ways of producing DLC layers with chemical inertness, high gas barrier properties and high biocompatibility. The aim of the experiments was to characterize and compare the properties of diamond-like carbon films prepared from different mixtures such as CH4/H2, CH4/H2/N2 and CH4/Ar from a radiofrequency capacitively-coupled discharge at 13.56 MHz. Parameters like concentration, pressure, power and time were changed to vary film properties. The films were optically characterized by UV-VIS reflectometry, ellipsometry. Layer composition was investigated by FTIR transmittance and Rutherford backscattering spectrometry (RBS) in combination with elastic recoil detection analysis (ERDA). The mechanical properties were assessed by depth-sensing indentation (DSI). Interesting properties of diamond-like carbon (DLC) coatings such as high hardness, low friction coefficient, high thermal conductivity and wide band gaps have increased the number of industrial partners to research ways of producing DLC layers with chemical inertness, high gas barrier properties and high biocompatibility. The aim of the experiments was to characterize and compare the properties of diamond-like carbon films prepared from different mixtures such as CH4/H2, CH4/H2/N2 and CH4/Ar from a radiofrequency capacitively-coupled discharge at 13.56 MHz. Parameters like concentration, pressure, power and time were changed to vary film properties. The films were optically characterized by UV-VIS reflectometry, ellipsometry. Layer composition was investigated by FTIR transmittance and Rutherford backscattering spectrometry (RBS) in combination with elastic recoil detection analysis (ERDA). The mechanical properties were assessed by depth-sensing indentation (DSI). (en)
Title	INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC (en)
skos:prefLabel	INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC INFLUENCE OF PLASMA DEPOSITION PARAMETERS ON INCORPORATION OF HYDROGEN OR NITROGEN INTO DLC (en)
skos:notation	RIV/00216224:14310/11:00050061!RIV12-GA0-14310___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GD104/09/H080), Z(MSM0021622411)
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Peřina, Vratislav Zajíčková, Lenka Buršíková, Vilma Nečas, David Franta, Daniel Muresan, Mihai George
http://linked.open.../riv/druhVysledku	O - Ostatní výsledky nezařaditelné do žádného z výše uvedených druhů výsledku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	204519
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/11:00050061
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Diamond-like carbon; Amorphous hydrogenated carbon; Optical properties; Nitrogen (en)
http://linked.open.../riv/klicoveSlovo	Nitrogen Amorphous hydrogenated carbon Diamond-like carbon Optical properties
http://linked.open...ontrolniKodProRIV	[7B4D15791EB1]
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	6 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Plasmachemical processes and their technological applications
http://linked.open...UplatneniVysledku	2011
http://linked.open...iv/tvurceVysledku	Buršíková, Vilma Franta, Daniel Nečas, David Zajíčková, Lenka Mikšová, Romana Peřina, Vratislav Muresan, Mihai George
http://linked.open...n/vavai/riv/zamer	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
http://localhost/t...ganizacniJednotka	14310

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