About: Effect of Nitrogen Incorporation on Optical Properties of DLC Layers

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Diamond-like carbon (amorphous hydrogenated carbon: a-C:H) films doped with different amount of nitrogen were deposited by plasma enhanced chemical vapor deposition (PECVD) using capacitively coupled rf discharge 13.56 in the mixture of CH4/H2/N2 on silicon substrates. Nitrogen content allowed reduction of the inherent internal stress of the DLC layer. DC self-bias, time and gas feed composition parameters were used for modification of the optical properties, adhesion to substrates, chemical composition and structure of the deposited films. Diamond-like carbon (amorphous hydrogenated carbon: a-C:H) films doped with different amount of nitrogen were deposited by plasma enhanced chemical vapor deposition (PECVD) using capacitively coupled rf discharge 13.56 in the mixture of CH4/H2/N2 on silicon substrates. Nitrogen content allowed reduction of the inherent internal stress of the DLC layer. DC self-bias, time and gas feed composition parameters were used for modification of the optical properties, adhesion to substrates, chemical composition and structure of the deposited films. (en)
Title	Effect of Nitrogen Incorporation on Optical Properties of DLC Layers Effect of Nitrogen Incorporation on Optical Properties of DLC Layers (en)
skos:prefLabel	Effect of Nitrogen Incorporation on Optical Properties of DLC Layers Effect of Nitrogen Incorporation on Optical Properties of DLC Layers (en)
skos:notation	RIV/00216224:14310/10:00047539!RIV11-GA0-14310___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GD104/09/H080), Z(MSM0021622411)
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Zajíčková, Lenka Nečas, David Franta, Daniel Muresan, Mihai George
http://linked.open.../riv/druhVysledku	O - Ostatní výsledky nezařaditelné do žádného z výše uvedených druhů výsledku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	256081
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/10:00047539
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Diamond-Like Carbon; optical properties (en)
http://linked.open.../riv/klicoveSlovo	Diamond-Like Carbon optical properties
http://linked.open...ontrolniKodProRIV	[74B892552C39]
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Plasmachemical processes and their technological applications
http://linked.open...UplatneniVysledku	2010
http://linked.open...iv/tvurceVysledku	Franta, Daniel Nečas, David Zajíčková, Lenka Muresan, Mihai George
http://linked.open...n/vavai/riv/zamer	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
http://localhost/t...ganizacniJednotka	14310

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