About: Determination of electron temperature in neon RF discharge by means of collisional-radiative model

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	A collisional-radiative model was used to determine the electron temperature in capacitively coupled RF (13.56 MHz) discharge in neon. Two discharge regimes at different pressures were investigated. The temperature was determined from the fit of the theoretical spectra to the spectra measured by optical emission spectroscopy. Three kinds of electron distribution function - Maxwellian, Bi-Maxwellian and Pseudo-Bi-Maxwellian - were considered. The results were compared with Particle-in-Cell/ Monte-Carlo simulation. The comparison of the fitted calculated and measured spectra shows a good agreement between the theory and experiment. The electron temperature, which was estimated from the fits, was approx. 6 eV in the sheath at neon pressure of 10 Pa and approx. 2 eV in the bulk plasma at neon pressure of 80 Pa. A collisional-radiative model was used to determine the electron temperature in capacitively coupled RF (13.56 MHz) discharge in neon. Two discharge regimes at different pressures were investigated. The temperature was determined from the fit of the theoretical spectra to the spectra measured by optical emission spectroscopy. Three kinds of electron distribution function - Maxwellian, Bi-Maxwellian and Pseudo-Bi-Maxwellian - were considered. The results were compared with Particle-in-Cell/ Monte-Carlo simulation. The comparison of the fitted calculated and measured spectra shows a good agreement between the theory and experiment. The electron temperature, which was estimated from the fits, was approx. 6 eV in the sheath at neon pressure of 10 Pa and approx. 2 eV in the bulk plasma at neon pressure of 80 Pa. (en)
Title	Determination of electron temperature in neon RF discharge by means of collisional-radiative model Determination of electron temperature in neon RF discharge by means of collisional-radiative model (en)
skos:prefLabel	Determination of electron temperature in neon RF discharge by means of collisional-radiative model Determination of electron temperature in neon RF discharge by means of collisional-radiative model (en)
skos:notation	RIV/00216224:14310/07:00020430!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA202/03/0776), P(GA202/06/0776), P(GA202/06/1473), Z(MSM0021622411)
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Lazar, Lukáš Brzobohatý, Oto Navrátil, Zdeněk Šmíd, Radek Trunec, David
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Masarykova univerzita / Přírodovědecká fakulta
http://linked.open...dnocenehoVysledku	416654
http://linked.open...ai/riv/idVysledku	RIV/00216224:14310/07:00020430
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	neon RF discharge; optical emission spectroscopy; collisional-radiative model (en)
http://linked.open.../riv/klicoveSlovo	optical emission spectroscopy neon RF discharge collisional-radiative model
http://linked.open...ontrolniKodProRIV	[FD64D8A39CD9]
http://linked.open...v/mistoKonaniAkce	Praha
http://linked.open...i/riv/mistoVydani	Praha
http://linked.open...i/riv/nazevZdroje	Proceedings of ICPIG XXVIII
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Magneto-optical effects in magnetic nanostructures Advanced research and development of low-temperature plasma sources Deposition of thin films in dielectric barrier discharges at atmospheric pressure
http://linked.open...UplatneniVysledku	2007
http://linked.open...iv/tvurceVysledku	Brzobohatý, Oto Navrátil, Zdeněk Šmíd, Radek Trunec, David Lazar, Lukáš
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2007-07-15 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
number of pages	3 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Ústav fyziky plazmatu AV ČR
https://schema.org/isbn	978-80-87026-01-4
http://localhost/t...ganizacniJednotka	14310

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