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Description
  • To investigate the generation and transport of ions during and after a high power current pulse applied on magnetron cathode, we performed spectroscopic measurements with time and space resolution. The microwave antennas placed between target and substrate ensure proper conditions of current pulse development, ion transport and., by re-exciting sputtered species, allows spectroscopic emission measurements of species transported towards the substrate. Measured data are presented and discussed.
  • To investigate the generation and transport of ions during and after a high power current pulse applied on magnetron cathode, we performed spectroscopic measurements with time and space resolution. The microwave antennas placed between target and substrate ensure proper conditions of current pulse development, ion transport and., by re-exciting sputtered species, allows spectroscopic emission measurements of species transported towards the substrate. Measured data are presented and discussed. (en)
Title
  • Spectroscopic analysis of a pulsed magnetron discharge
  • Spectroscopic analysis of a pulsed magnetron discharge (en)
skos:prefLabel
  • Spectroscopic analysis of a pulsed magnetron discharge
  • Spectroscopic analysis of a pulsed magnetron discharge (en)
skos:notation
  • RIV/00216224:14310/05:00012905!RIV10-MSM-14310___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GD202/03/H162), Z(MSM0021622411)
http://linked.open...iv/cisloPeriodika
  • 5
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 543902
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/05:00012905
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • pulsed magnetron; spatially resolved diagnostics; time resolved diagnostics; transport processes; preionisation (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • RO - Rumunsko
http://linked.open...ontrolniKodProRIV
  • [C898113081E6]
http://linked.open...i/riv/nazevZdroje
  • Journal of Optoelectronics and Advanced Materials
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 7
http://linked.open...iv/tvurceVysledku
  • Vašina, Petr
  • Meško, Marcel
  • Boisse-Laporte, Caroline
  • Bretagne, Jean
  • Touzeau, Michel
  • de Poucques, Ludovic
  • Imbert, Jean-Christophe
  • Teulé-Gay, Lionel
  • Ganciu, Mihai
  • Pagnon, Daniel
http://linked.open...n/vavai/riv/zamer
issn
  • 1454-4164
number of pages
http://localhost/t...ganizacniJednotka
  • 14310
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