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  • In this article results concerning both the theoretical and experimental studies of the upper boundaries of columnar thin fil ms performed using the atomic force microscopy are presented. Main statistical quantities used to determine the roughness of the columnar thin film upper boundary properties are decribed. The errors due to the tip convolution effects are discussed as well. For the theoretical study the columnar structure obtained by a simple Monte-Carlo simulation is employed. The experime ntal values of the statistical quantities are obtained by measuring the HfO2 (hafnia) and ZrO2 (zirconia) thin films created by vacuum evaporation. Within both the theoretical and experimental studies presented it is shown that the strongest misrepresentation of the measured roughness of the upper boundaries of the columnar thin films originates for the linear dimensions o f the columns smaller or comparable with the linear dimensions of the tip of an atomic force microscope used. The results of the surface r
  • In this article results concerning both the theoretical and experimental studies of the upper boundaries of columnar thin fil ms performed using the atomic force microscopy are presented. Main statistical quantities used to determine the roughness of the columnar thin film upper boundary properties are decribed. The errors due to the tip convolution effects are discussed as well. For the theoretical study the columnar structure obtained by a simple Monte-Carlo simulation is employed. The experime ntal values of the statistical quantities are obtained by measuring the HfO2 (hafnia) and ZrO2 (zirconia) thin films created by vacuum evaporation. Within both the theoretical and experimental studies presented it is shown that the strongest misrepresentation of the measured roughness of the upper boundaries of the columnar thin films originates for the linear dimensions o f the columns smaller or comparable with the linear dimensions of the tip of an atomic force microscope used. The results of the surface r (en)
  • In this article results concerning both the theoretical and experimental studies of the upper boundaries of columnar thin fil ms performed using the atomic force microscopy are presented. Main statistical quantities used to determine the roughness of the columnar thin film upper boundary properties are decribed. The errors due to the tip convolution effects are discussed as well. For the theoretical study the columnar structure obtained by a simple Monte-Carlo simulation is employed. The experime ntal values of the statistical quantities are obtained by measuring the HfO2 (hafnia) and ZrO2 (zirconia) thin films created by vacuum evaporation. Within both the theoretical and experimental studies presented it is shown that the strongest misrepresentation of the measured roughness of the upper boundaries of the columnar thin films originates for the linear dimensions o f the columns smaller or comparable with the linear dimensions of the tip of an atomic force microscope used. The results of the surface r (cs)
Title
  • Applications of atomic force microscopy for thin film boundary measurements
  • Applications of atomic force microscopy for thin film boundary measurements (en)
  • Applications of atomic force microscopy for thin film boundary measurements (cs)
skos:prefLabel
  • Applications of atomic force microscopy for thin film boundary measurements
  • Applications of atomic force microscopy for thin film boundary measurements (en)
  • Applications of atomic force microscopy for thin film boundary measurements (cs)
skos:notation
  • RIV/00216224:14310/02:00006295!RIV08-GA0-14310___
http://linked.open.../vavai/riv/strany
  • 195-199
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GA101/01/1104), P(GA202/01/1110)
http://linked.open...iv/cisloPeriodika
  • 6-7
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 638876
http://linked.open...ai/riv/idVysledku
  • RIV/00216224:14310/02:00006295
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Roughness; Atomic Force Microscopy (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • CZ - Česká republika
http://linked.open...ontrolniKodProRIV
  • [4B38DF32D57D]
http://linked.open...i/riv/nazevZdroje
  • Jemná mechanika a optika
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 47
http://linked.open...iv/tvurceVysledku
  • Franta, Daniel
  • Klapetek, Petr
  • Ohlídal, Ivan
issn
  • 0447-6441
number of pages
http://localhost/t...ganizacniJednotka
  • 14310
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