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Description
  • Spatial variations of plasma parameters have been studied in the cylindrical magnetron device using the radially movable Langmuir probe. Measurements were performed in the neon weakly magnetized plasma. The probe system was controlled by the Agilent VEE software. From probe characteristics, radial dependences of plasma parameters (plasma potential, floating potential, electron density) were obtained. This study is concentrated to new results obtained from spherical probe and comparison with cylindrical probe.
  • Spatial variations of plasma parameters have been studied in the cylindrical magnetron device using the radially movable Langmuir probe. Measurements were performed in the neon weakly magnetized plasma. The probe system was controlled by the Agilent VEE software. From probe characteristics, radial dependences of plasma parameters (plasma potential, floating potential, electron density) were obtained. This study is concentrated to new results obtained from spherical probe and comparison with cylindrical probe. (en)
Title
  • Langmuir Probe Diagnostics of DC Cylindrical Magnetron
  • Langmuir Probe Diagnostics of DC Cylindrical Magnetron (en)
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  • Langmuir Probe Diagnostics of DC Cylindrical Magnetron
  • Langmuir Probe Diagnostics of DC Cylindrical Magnetron (en)
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  • RIV/00216208:11320/13:10192443!RIV14-MSM-11320___
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  • S
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  • 84268
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  • RIV/00216208:11320/13:10192443
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  • DC cylindrical magnetron; Langmuir probe (en)
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http://linked.open...ontrolniKodProRIV
  • [FB9EF1A723E9]
http://linked.open...v/mistoKonaniAkce
  • Praha
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  • Praha
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  • WDS'13 Proceedings of Contributed Papers: Part II - Physics of Plasmas and Ionized Media
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  • Kudrna, Pavel
  • Tichý, Milan
  • Kolpaková, Anna
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number of pages
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  • Matfyzpress
https://schema.org/isbn
  • 978-80-7378-251-1
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  • 11320
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